Integrated manufacturing technology of off-axis three-mirror anastigmatic system
Donglin Xue
Key Laboratory of Optical System Advanced Manufacturing Technology, [Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences], Changchun 130033, China

Chin. Opt. Lett., 2014, 12(s2): pp.S21202

DOI:10.3788/COL201412.S21202
Topic:Instrumentation, measurement, and metrology
Keywords(OCIS Code): 120.3940  120.4630  120.4800  240.6700  

Abstract
The integrated manufacturing technology is introduced to improve the imaging quality of an off-axis -three-mirror anastigmatic (TMA) system. With the integration of system design, manufacturing of highly -precise optical elements, simulation and evaluation capabilities of the manufactured system, and testing and -alignment with the same fiducial, we can efficiently and precisely achieve high quality of an optical system. In order to prove the efficiency of this technology, we design an off-axis TMA system with MTF invariance better than 0.50 (57 lp/mm), and manufacture the aspherical surfaces of this optical system with surface figure error better than l/50 (RMS, l = 632.8 nm). We develop an interface software named MetroMax to achieve the connection between the final surface figure and the optical design software. The MetorMax also forecasts the imaging quality of the system, and guide us in aligning the system with a same fiducial with the whole field of view approached l/14 and MTF invariance better than 0.95. To confirm the imaging system after integrated manufacturing, we test the system on the ground and orbit; the result proves effective improvement in the imaging quality of the optical system.

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Received:2014/1/13
Accepted:2014/3/15
Posted online:2014/10/21

Get Citation: Donglin Xue, "Integrated manufacturing technology of off-axis three-mirror anastigmatic system," Chin. Opt. Lett. 12(s2), S21202(2014)

Note: This work was supported by the National Natural Science Foundation of China (No. 61036015) and the National High Technology Research & Development Program of China (No. O8663NJ090).



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